Processing Method for Metallic Substrate Using the Liquid Metal Lapping-Polishing Plate

Metal is the primary substrate for fabricating flexible sensors, and its surface quality has a significant effect on performance of these sensors. The traditional lapping-polishing technology disadvantages being time-consuming presenting difficulty in controlling uniformity. In this paper, liquid metal plate with self-shaping function proposed developed, which can realize high low damage processing metallic substrate. It found from fundaments that temperature generated by friction between workpiece plays an important role affecting performance, then numerical study field been carried out, it increase increment pressure rotation speed target surface. Finally, experiments experimental results have shown to be good agreement corresponding data highest under specific conditions significantly improved as well.